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Design and fabrication of an ultrafast expanding microbubble valve array for use in a microreactor to measure sub millisecond reaction kinetics

Mishra, Nishant (2021) Design and fabrication of an ultrafast expanding microbubble valve array for use in a microreactor to measure sub millisecond reaction kinetics.

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Abstract:Photoelectrochemical reduction of Carbon Dioxide can be used to sequester carbon and provide synthetic alternatives to fossil fuels. The yields of these electrochemical reduction reactions can be improved using catalysts. Better catalysts can be designed by studying the kinetics of these reduction reactions. Infrared spectroscopy is one of the techniques to study these reactions. Recent advances in laser sources have enabled infrared spectroscopy in microseconds. Now, mass transport of gases needs to be controlled on the same time scale. In this work, a design cycle to fabricate a microvalve for controlling mass transport in a sub millisecond time scale was executed. A survey of the potential valving mechanisms on a microreactor was conducted. This was followed by design, simulation and calculations based on device dimensions, deflection and gas flow rates through such valves. A novel cleanroom process was used to define features at different depths with a single exposure mask. Photomasks were designed keeping the design choices and process flow in mind. Optimization of the process for fabricating these structures was attempted. The heat flow was modelled and the input electrical power was calculated. A control scheme for these valves was designed.
Item Type:Essay (Master)
Faculty:EEMCS: Electrical Engineering, Mathematics and Computer Science
Subject:53 electrotechnology
Programme:Electrical Engineering MSc (60353)
Link to this item:https://purl.utwente.nl/essays/88183
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