University of Twente Student Theses
Establishing a thermal atomic layer deposition process for AlGaN
Steenge, Céline (2022) Establishing a thermal atomic layer deposition process for AlGaN.
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| Full Text Status: | Access to this publication is restricted |
| Embargo date: | 26 August 2029 |
| Item Type: | Essay (Master) |
| Faculty: | EEMCS: Electrical Engineering, Mathematics and Computer Science |
| Subject: | 33 physics, 35 chemistry, 51 materials science, 53 electrotechnology |
| Programme: | Electrical Engineering MSc (60353) |
| Link to this item: | https://purl.utwente.nl/essays/91687 |
| Export this item as: | BibTeX EndNote HTML Citation Reference Manager |
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